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濕式蝕刻

TMAH 蝕刻

TMAH etching.jpg

Customized Specifications

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6" & 8"

Substrate: Silicon

Different Additives in the Etching Solution

Concentration of Chemical Solution

Etching Rate

KOH 蝕刻

KOH etching.jpg

Customized Specifications

​​

6" & 8"

Substrate: Silicon

Different Additives in the Etching Solution

Concentration of Chemical Solution

Etching Rate​​​

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